Electronic mixed gas is a mixed gas containing two or more effective components, or although it is not an effective component, but its content exceeds the specified limit.
Product characteristics
Electronic gas mixtures are highly accurate and are often stored in high-pressure gas cylinders. Can be roughly divided into epitaxial mixed gas, chemical vapor deposition mixed gas, doped mixed gas, etching mixed gas and other electronic mixed gas.
Application instructions
Electronic mixed gas is widely used in the production process of doping of semiconductor integrated circuits.